>> 自然科学版期刊 >> 2018年05期 >> 正文
微坑阵列的粒子掩膜电沉积工艺及其均匀性研究
供稿: 秦歌;周奎;明平美;赵西梅;李润清 时间: 2018-09-29 次数:

作者:秦歌周奎明平美赵西梅李润清

作者单位:河南理工大学机械与动力工程学院

摘要:周期性微纳米结构阵列可以显著改变金属零件的表面性能。提出一种以电泳法制备胶体粒子掩膜、在其间隙中电沉积金属制作微坑阵列的工艺,采用有限元仿真和试验对胶体粒子掩膜电沉积过程进行了研究,并对改善微坑阵列均匀性的工艺进行了探讨。结果表明:电流密度和沉积时间影响微坑形貌和均匀性;电沉积过程中的析氢副反应是影响掩膜粒子能否在基底上保持的主要因素;适当的热处理工艺可改善胶体粒子掩膜电沉积微坑阵列的均匀性。

基金:国家自然科学基金资助项目(51105134);河南省基础与前沿技术研究项目(162300410025);河南省高校科技创新团队支持计划项目(ISIRTSTHN013);河南理工大学博士基金资助项目(B2012-053);

关键词:粒子掩膜;电沉积;微坑陈列;有限元;均匀性;

Abstract:Ordered microstructures on metal surface could obviously improve the parts' surface properties. A novel process of fabricating micro-dimple array through electrodeposition method using colloidal particles mask on a metal surface was presented and studied by finite element method and experiments, and a method of improving the uniformity of the micro-dimple array was discussed. The results showed that the morphology and the uniformity of micro-dimples were influenced by the time and the current density of the electrodeposition process, and the hydrogen evolution reaction was the major factor in influencing the stability of the colloidal particle mask on the metal surface. The proper heat treatment process could improve the uniformity of the micro-dimple array electrodeposited using the heated colloidal particles mask.

DOI:10.16186/j.cnki.1673-9787.2018.05.13

分类号:TQ153

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