李长有, 陈方静, 王耿,等.基于自适应反演滑模的键合线缠绕张力控制方法[J].河南理工大学学报（自然科学版）,2023,42(6):103-109.

LI C Y, CHEN F J, WANG G,et al.Tension control method of bond wire winding based on adaptive backstepping sliding mode[J].Journal of Henan Polytechnic University(Natural Science) ,2023,42(6):103-109.

基于自适应反演滑模的键合线缠绕张力控制方法

李长有1,2, 陈方静1,2, 王耿1,2, 魏维宁1,2, 闫勇刚1,2

1.河南理工大学 机械与动力工程学院，河南 焦作  454000;2.河南理工大学 精密工程研究所，河南 焦作  454000

摘要:针对键合线缠绕运动存在耦合性强和张力波动等问题，提出一种自适应反演滑模控制方法应用于缠绕控制系统。该方法依据反演的控制思想将复杂系统分解成不超过系统阶数的子系统，然后从系统的最低阶次系统方程开始，引入虚拟控制量，结合滑模控制定义逐步设计满足要求的虚拟控制，最终设计出系统的实际控制方法。同时采用自适应算法对不确定性参数进行估计，根据Lyapunov稳定性理论设计参数自适应率，并设计模糊逼近作为滑模控制器中的切换控制项，从而保证系统稳定性。通过分析摆角波动与响应时间数据，发现采用自适应反演滑模控制能提高系统稳定性。比较自适应反演滑模控制与常用的模糊PID控制算法，结果表明，在键合线缠绕运动中，自适应反演滑模控制的张力摆杆摆角波动控制在±1.4°内，优于常规模糊PID的，能更有效地控制张力输出。

关键词:键合线;张力控制器;自适应反演;滑模;模糊逼近

doi:10.16186/j.cnki.1673-9787.2021120086

基金项目:国家自然科学基金资助项目（51975188）；河南理工大学博士基金资助项目（B2017-32）

收稿日期:2021/12/23

修回日期:2022/05/10

出版日期:2023/11/25

Tension control method of bond wire winding based on adaptive backstepping sliding mode

LI Changyou1,2, CHEN Fangjing1,2, WANG Geng1,2, WEI Weining1,2, YAN Yonggang1,2

1.School of Mechanical and Power Engineering，Henan Polytechnic University，Jiaozuo  454000，Henan，China;2.Institute of Precision Engineering，Henan Polytechnic University，Jiaozuo  454000，Henan，China

Abstract:In order to solve the problems of strong coupling and tension fluctuation in the tension control motion of bond wire winding，an improved adaptive backstepping sliding mode control algorithm was applied to the winding control system.In this control algorithm，the complex system was decomposed into several simple subsystems.Then the virtual control quantity was introduced from the lowest order system equation.And in combination with sliding mode control definition，virtual control was gradually designed to meet the requirements.Finally，the actual control law of the system was designed.An adaptive algorithm was used to estimate the uncertain parameters，and fuzzy approximation was designed as the switching control item in the sliding mode controller.According to Lyapunov stability theory，the adaptive rate of parameters was designed to ensure the stability of the system.By analyzing the data of swing angle fluctuation and response time，adaptive backstepping sliding mode control can improve the stability of the system.Compared with the fuzzy PID control algorithm，with the pendulum angle fluctuation of tension swing rod was controlled inside±1.4°，the adaptive backstepping sliding mode control was better in controlling tension output more effectively.

Key words:bonding wire;tension controller;adaptive backstepping;sliding-mode;fuzzy approximation

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