Abstract：Piezoelectric fast steering mirror( PFSM) is a complex strong coupling nonlinear system that integrates optics,mechanics,electrics,control. It is difficult to control PFSM effectively due to the existence of hysteresis nonlinearity,thus the precise tracking control of the PFSM is a challenging task. The SISO ideal model of PFSM is established,and the hysteresis non-linearity is treated as a kind of disturbance,then the self-tuning PID algorithm is used to control the PFSM. The parameters of PID can adaptively be tuned to achieve high performance. From the dynamical positioning experiments,The self-tuning PID algorithm can perfectly control the PFSM,and maximum error reaches 0. 66%,mean error is 0. 10%. The experimental results verified the effectiveness of the proposed control strategy.

Keyword：piezoelectric fast steering mirror;hysteresis nonlinear;self-tuning PID;dynamic tracking;