Abstract：Carbon films is a new type material which has bright future in the development and application.It is excellent performance are widely concerned.The comments of the carbon films' preparation, in recent years, such as application of metal-containing carbon films, diamond like carbon films, carbon films for gas separation and nanostructured carbon films are given in the paper.The influencing factors and the characterization methods of the structure and performance of carbon films were summarized.In next few years, the carbon films researches and application will be further developed, the processes of carbon films's preparation are devoted to simplified, and more cheaper carbon source is seeked for the carbon films.Meanwhile the application of carbon films should be more focused.

Keyword：carbon films;fabrication;characterization;diamond-like carbon;graphite-like carbon;