ZHANG X M, CHEN T, ZHOU H M, et al.Study on the characteristics of ultrasonic guided wave in a piezoelectric semiconductor plate[J].Journal of Henan Polytechnic University(Natural Science) ,2023,42(1):95-101.

doi:10.16186/j.cnki.1673-9787.2021070032

Received:2021/07/07

Revised:2021/10/07

Published:2023/01/25

Study on the characteristics of ultrasonic guided wave in a piezoelectric 

semiconductor plate

ZHANG Xiaoming, CHEN Tao, ZHOU Hongmei, YU Jiangong

School of Mechanical and Power Engineering，Henan Polytechnic University，Jiaozuo 454000，Henan，China

Abstract:The characteristics of ultrasonic guided wave in a piezoelectric semiconductor plate were investigated by using the analytical Legendre polynomial method.The presented method converted a large number of numerical integrals existing in the traditional Legendre polynomial method to the analytical integral calculation，which overcame the shortcomings of large amount of calculation and time-consuming.The coupled wave equations of piezoelectric semiconductor plate with different electrical boundaries were derived and transformed into the characteristic calculation problem with wave number as eigenvalue using the presented method，and then the dispersion relation was obtained.To validate the presented method，the spectrum of SH wave in a piezoelectric semiconductor plate was calculated and compared with the available literature results.The phase velocity dispersion，attenuation and stress distribution of Lamb wave in a piezoelectric semiconductor plate were studied.The effects of electrical boundary conditions and steady-state carrier density on phase velocity dispersion and attenuation，and the effects of steady-state carrier density on stress distribution were illustrated.The numerical results showed that the electrical boundary conditions and steady-state carrier density had significant effects on the Lamb wave phase velocity and attenuation，and the ultrasonic guided wave characteristics could be regulated by adjusting the steady-state carrier density.

Key words:piezoelectric semiconductor;Legendre polynomial method;analytical integral;phase velocity;attenuation

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