doi:10.16186/j.cnki.1673-9787.2020080032

Received:2020/08/11

Revised:2020/10/24

Published:2021/09/15

Error tracing and calibration analysis of colorful spectral confocal sensor

YAN Yonggang1, LIU Zhihao1, ZHU Xiaoping2, DU Hua2, LI Jiafu2, WANG Geng1

1.School of Mechanical & Power Engineering， Henan Polytechnic University， Jiaozuo 454000 ， Henan， China， Beijing  100029， China;2.National Institute of Metrology， Beijing  100029， China

Abstract: Aiming at the problems of inconsistent calibration methods and difficult evaluation of metrology characteristics for domestic spectral confocal sensors， three kinds of calibration methods were developed and applied to the measurement of metrology characteristics for the sensors. The characteristics， such as basic error， linearity， repeatability and hysteresis error， were evaluated respectively for a certain of spectral confocal sensor by using precision displacement platform， length-measuring machine and laser interferometer. The maximum basic errors were respectively 2.76，3.40，1.17 μm within the measurement range. The linearity was 0.689% ，0.850% respectively， 0. 293%. The repeatability was 1. 463，1.324，0.787 μm respectively. And it was 0.51 μm for the hysteresis error with laser interferometer. The results showed that the three calibrations wee valid， and the accuracy of the calibrated spectral confocal sensor could meet the requirement. The calibration methods changed with the different measurement needs， of which the calibration accuracy and correctness by using laser interferometer was highest and reliable. The study was very helpful to improve the calibration efficiency and reliability of spectral confocal displacement sensors， and would also provide an experimental basis for the development and improvement of the flatness measurement of large-scale glass.

Key words:metrology;spectral confocal displacement sensor;calibration;non-contact measurement;error analysis

 彩色光谱共焦传感器误差溯源及其校准方法分析_闫勇刚.pdf